- maskless electro-chemical micromachining
- безмасковая электрохимическая микрообработка.
Англо-русский словарь промышленной и научной лексики. 2014.
Англо-русский словарь промышленной и научной лексики. 2014.
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia